Silicon oxynitride platform for linear and nonlinear photonics at NIR wavelength 
G. Piccoli, M. Sanna, M. Borghi, L. Pavesi and M.Ghulinyan
OPTICAL MATERIALS EXPRESS Vol.12 Issue 9 pp. 3551-3562 (2022)
URL: http://opg.optica.org/ome/abstract.cfm?URI=ome-12-9-3551